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高级工程师

硕士生导师

任职 : 微电子实验教学中心主任

性别:男

毕业院校:大连理工大学

学位:博士

所在单位:集成电路学院

学科:微电子学与固体电子学. 光学工程

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The properties of reversed polarization yellow InGaN-GaN MQWs in p-side down structure grown by metal-organic chemical vapor deposition on sapphire substrate

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论文类型:期刊论文

发表时间:2014-11-01

发表刊物:PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES

收录刊物:SCIE、EI

卷号:64

页面范围:57-62

ISSN号:1386-9477

关键字:III-nitrides; Reversed polarization LEDs; P-side down structure; Yellow emission

摘要:The reversed polarization yellow emission InGaN/GaN multiple quantum wells (MQWs) in p-side down (PDMQWs) and n-side down (NDMQWs) structures were grown by metal-organic chemical vapor deposition on sapphire substrates. The properties of PDMQWs in surface morphology, interface quality, optical characteristic, and impurities distribution were investigated and compared with those of NDMQWs. Though degrading the interface abruptness of PDMQWs, the rough surface of p-GaN underlying layer was found to promote InGaN compositional fluctuation or phase separation and the resultant formation of nanodot-like structures with higher In-composition. At the same growth conditions and the similar In-composition for two MQWs, PDMQWs present a longer emission wavelength with an extra emission peak from In-rich nanodot-like structures, compared with that of NDMQWs. Mg memory effect introduces high concentrations of Mg residual in PDMQWs accompanying with the incorporation of C, H, and 0 impurities, which impose negative influence on the optical properties of PDMQWs. The potentials and problems, as well as the possible problem-solving methods of p-side down light-emitting diodes (PDLEDs) in developing long wavelength emitter were also discussed, which may bring some new thinkings for the design of III-nitrides PDLEDs. (C) 2014 Elsevier By. All rights reserved.