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论文类型：期刊论文

发表时间：2015-11-01

发表刊物：MICROMACHINES

收录刊物：SCIE、EI、Scopus

卷号：6

期号：11

页面范围：1597-1605

ISSN号：2072-666X

关键字：multifunctional platform; microhotplate; Pirani sensor; temperature sensor; gas sensor

摘要：A multifunctional platform based on the microhotplate was developed for applications including a Pirani vacuum gauge, temperature, and gas sensor. It consisted of a tungsten microhotplate and an on-chip operational amplifier. The platform was fabricated in a standard complementary metal oxide semiconductor (CMOS) process. A tungsten plug in standard CMOS process was specially designed as the serpentine resistor for the microhotplate, acting as both heater and thermister. With the sacrificial layer technology, the microhotplate was suspended over the silicon substrate with a 340 nm gap. The on-chip operational amplifier provided a bias current for the microhotplate. This platform has been used to develop different kinds of sensors. The first one was a Pirani vacuum gauge ranging from 10(-1) to 10(5) Pa. The second one was a temperature sensor ranging from -20 to 70 degrees C. The third one was a thermal-conductivity gas sensor, which could distinguish gases with different thermal conductivities in constant gas pressure and environment temperature. In the fourth application, with extra fabrication processes including the deposition of gas-sensitive film, the platform was used as a metal-oxide gas sensor for the detection of gas concentration.