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论文类型：期刊论文

发表时间：2018-11-01

发表刊物：APPLIED SCIENCES-BASEL

收录刊物：SCIE、Scopus

卷号：8

期号：11

ISSN号：2076-3417

关键字：laser diode; interferometer; wavelength corrector; angular error; nanopositioning stage

摘要：This paper presents a miniature three-degree-of-freedom laser measurement (3DOFLM) system for displacement feedback and error compensation of a nanopositioning stage. The 3DOFLM system is composed of a miniature Michelson interferometer (MMI) kit, a wavelength corrector kit, and a miniature autocollimator kit. A low-cost laser diode is employed as the laser source. The motion of the stage can cause an optical path difference in the MMI kit so as to produce interference fringes. The interference signals with a phase interval of 90 degrees due to the phase control are detected by four photodetectors. The wavelength corrector kit, based on the grating diffraction principle and the autocollimation principle, provides real-time correction of the laser diode wavelength, which is the length unit of the MMI kit. The miniature autocollimator kit based on the autocollimation principle is employed to measure angular errors and compensate induced Abbe error of the moving table. The developed 3DOFLM system was constructed with dimensions of 80 mm (x) x 90 mm (y) x 20 mm (z) so that it could be embedded into the nanopositioning stage. A series of calibration and comparison experiments were carried out to test the performance of this system.