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论文类型：期刊论文

发表时间：2017-08-01

发表刊物：SENSORS AND ACTUATORS B-CHEMICAL

收录刊物：SCIE、EI、Scopus

卷号：247

页面范围：290-295

ISSN号：0925-4005

关键字：Fabry-Perot; Silver diaphragm; Acoustic sensor; Photoacoustic spectroscopy

摘要：We demonstrate a high sensitive fiber-optic Fabry-Perot acoustic sensor with a wide measuring range based on a thin silver diaphragm. The silver diaphragm is fabricated by vacuum magnetron sputter deposition, therefore it has strong adhesion and good compactness. Based on these characteristics, the silver diaphragm is fabricated with few millimeters lever of diameter for a high pressure sensitivity of 5.97 mu m/kPa and a low temperature sensitivity of 0.139 nm/degrees C. Acoustic testing demonstrates a noise equivalent acoustic signal level of similar to 40 mu Pa/Hz(1/2) at the frequency of 1.6 kHz. The acoustic sensor is applied in an all-optical trace gas detection system based on photoacoustic spectroscopy. With the wavelength modulation and harmonic detection method, the detection limit of acetylene is achieved to be 0.87 parts-per-billion volume (signal-to-noise ratio =1) at the wavelength of 1531.59 nm. (C) 2017 Elsevier B.V. All rights reserved.