Release Time:2019-03-09  Hits:

Indexed by: Journal Article

Date of Publication: 2012-08-01

Journal: PLASMA SCIENCE & TECHNOLOGY

Included Journals: Scopus、EI、SCIE

Volume: 14

Issue: 8

Page Number: 754-758

ISSN: 1009-0630

Key Words: surface-wave plasmas; plasma diagnosing; surface plasmon polaritons

Abstract: The plasma parameters of planar-type surface-wave plasmas (SWPs) are diagnosed based on the resonant excitation of surface plasmon polaritons (SPPs). The plasma parameter distributions are obtained by changing the discharge conditions of gas pressure and incident power. The measured experimental results show that the plasma near the heating layer is excited by surface waves of SPPs while the plasma located downstream originates from diffusion Moreover, the influence of high-frequency oscillations plays a significant role in producing the proposed SWPs with bi-Maxwellian electron energy distributions.