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多孔硅对单晶硅片电性能的影响

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Indexed by:期刊论文

Date of Publication:2013-01-01

Journal:人工晶体学报

Included Journals:PKU、ISTIC

Volume:42

Issue:11

Page Number:2363-2367

Pre One:多晶硅精炼提纯中铝硅合金的低温电解分离

Next One:Determination of B impurities in silicon by inductively coupled plasma emission spectrometry
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