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一种基于聚酰亚胺的柔性静电驱动MEMS继电器的制造方法

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First Author:liujunshan

Disigner of the Invention:舒振,赵欣悦,单晗,yinpenghe,zhangyue,duliqun,xuzheng

Affilication of Author(s):机械工程学院

Application Number:CN108584864A

Authorization number:CN201810375861.6

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