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论文类型：期刊论文

发表时间：2022-06-30

发表刊物：实验技术与管理

所属单位：机械工程学院

卷号：34

期号：9

页面范围：181-184

ISSN号：1002-4956

摘要：Ellipsometry plays an important role in the detection of the optical properties of materials and the film thickness,and ellipsometry measurement has also been incorporated into the experimental teaching in many colleges and universities.In view of the problems in the experimental teaching such as the lack of effective principle display and the insufficient integration with scientific research,the form and content of the course are changed.The device assembly of spectroscopic ellipsometry and the dynamic measurement video have been developed to increase the principle display in the ellipsometry measurement teaching,strengthen the theoretical integration,combine with the research reality,and increase the content of experiments.Through the measurement,analysis and discussion of different types of samples,the students'ability to solve the practical problems and their creative thinking are cultivated.

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