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含原子层沉积薄膜的MIM电容器研究

Release Time:2019-11-20  Hits:

Leading Scientist: Dayu ZHOU

Institution: 材料科学与工程学院

Project Source: 企事业单位委托科技项目

Status: 结题

Supported by: Hefei Andekeming Semiconductor Technology Co., Ltd.

Nature of Project: 横向

Date of Project Approval: 2019-09-25

Scheduled Completion Time: 2020-09-24

Date of Project Initiation: 2019-09-25

Date of Project Completion: 2024-07-01

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