Current position: Home >> Scientific Research >> Research Projects

含原子层沉积薄膜的MIM电容器研究

Hits:

Leading Scientist:Dayu ZHOU

Supported by:企事业单位委托科技项目

Status:结题

Supported by:合肥安德科铭半导体科技有限公司

Nature of Project:横向

Date of Project Approval:2019-09-25

Scheduled completion time:2020-09-24

Date of Project Initiation:2019-09-25

Date of Project Completion:2024-07-01

Pre One:存算一体器件及其计算新架构

Next One:生物芯片用高比电容快频率响应特性氮化钛(TiN)电极的制备及微米图形化