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生物芯片用高比电容快频率响应特性氮化钛(TiN)电极的制备及微米图形化

Release Time:2019-11-20  Hits:

Leading Scientist: Dayu ZHOU

Project Source: 企事业单位委托科技项目

Status: 结题

Supported by: Chengdu Jinshi Technology Co., Ltd.

Nature of Project: 横向

Date of Project Approval: 2019-09-01

Scheduled Completion Time: 2020-08-31

Date of Project Initiation: 2019-09-01

Date of Project Completion: 2024-07-01

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