Current position: Home >> Scientific Research >> Research Projects

生物芯片用高比电容快频率响应特性氮化钛(TiN)电极的制备及微米图形化

Hits:

Leading Scientist:Dayu ZHOU

Supported by:企事业单位委托科技项目

Status:结题

Supported by:成都今是科技有限公司

Nature of Project:横向

Date of Project Approval:2019-09-01

Scheduled completion time:2020-08-31

Date of Project Initiation:2019-09-01

Date of Project Completion:2024-07-01

Pre One:含原子层沉积薄膜的MIM电容器研究

Next One:生物芯片用微米图形化氮化钛(TiN)电极制备