面向压力传感芯片应用的TiON薄膜应变机制与可靠性研究
Release Time:2026-03-21 Hits:
Discipline: Engineering
First-Level Discipline: Materials Science and Engineering
Note: 国家自然科学基金-联合基金重点支持项目
Project Level: National level
Project Approval Number: U2541262
Scheduled Completion Time: 2029-12-31
Date of Project Initiation: 2026-01-01