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Si掺杂HfO_2薄膜的铁电和反铁电性质

Release Time:2022-08-30  Hits:

Date of Publication: 2014-01-01

Journal: 物理学报

Institution: 材料科学与工程学院

Volume: 63

Issue: 11

Page Number: 294-298

ISSN: 1000-3290

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