location: Current position: Home >> Scientific Research >> Paper Publications

DC reactively sputtered TiNx thin films for capacitor electrodes

Hits:

Date of Publication:2022-10-06

Journal:JOURNAL OF MATERIALS SCIENCE MATERIALS IN ELECTRONICS

Volume:29

Issue:12

Page Number:10170-10176

ISSN No.:0957-4522

Pre One:Corrosion and leaching behaviors of Sn-based alloy in simulated soil solutions

Next One:DC substrate bias enables preparation of superior-performance TiN electrode films over a wide process window