Paper Publications
Facing-target mid-frequency magnetron reactive sputtered hafnium oxide film: Morphology and electrical properties
- Hits:
- First Author:
Zhang, Yu
- Correspondence Author:
XU Jun,wangyounian,Choi, Chi Kyu,Dayu ZHOU
- Date of Publication:
2022-10-02
- Journal:
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
- Document Type:
J
- Volume:
68
- Issue:
5
- Page Number:
679-685
- ISSN No.:
0374-4884