Tunable conduction mechanisms and sensitivity enhancement in ZrNx thin films for high-performance thermometer applications
Release Time:2026-03-17 Hits:
Indexed by: Journal Papers
Document Code: 595099
Date of Publication: 2026-01-06
Journal: JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
Volume: 37
Issue: 2
ISSN: 0957-4522
Key Words: CORROSION; DEPOSITION; GAP; NITRIDE; RESISTANCE; TEMPERATURE