Optimization of TiN/TiOxNy Laminated Electrode Films for High-Performance Gene Sequencing Chip
Release Time:2026-03-17 Hits:
Indexed by: Journal Papers
Document Code: 390427
Date of Publication: 2024-04-01
Journal: JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume: 171
Issue: 4
ISSN: 0013-4651
Key Words: MICRO-SUPERCAPACITORS; TITANIUM NITRIDE FILMS