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一种钇掺杂二氧化铪铁电薄膜的制备方法

Release Time:2020-04-09  Hits:

First Author: Dayu ZHOU

Disigner of the Invention: 赵鹏,Zhang Yu,XU Jun,徐进,孙纳纳

Authorization Number: ZL 2018 1 0171317.X

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