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Indexed by:期刊论文

Date of Publication:2012-08-01

Journal:Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument

Included Journals:EI、PKU、ISTIC、Scopus

Volume:33

Issue:8 SUPPL.

Page Number:79-82

ISSN No.:02543087

Abstract:This paper takes advantage of ANSYS10.0 to carry on both of the simulation and optimization of a thermal-actuated PDMS film microvalve, focusing on different structural parameters of heater, cavity and thickness of the PDMS film. The results show that although the narrower the heater is, the better the heat accumulates, the temperature distribution won't change largely when the size decreases below 0.4 mm. The displacement of the film is getting larger with the increase of radius of the cavity. An irregular result will happen during the simulation under different thicknesses of PDMS films. These simulation results will provide valuable information in the design of microvalve in the future.