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位移补偿器压电陶瓷微位移自动测量设备

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Date of Publication:2022-10-04

Journal:光学精密工程(增刊)

Affiliation of Author(s):机械工程学院

Volume:24

Issue:10

Page Number:461-467

Note:新增回溯数据

Pre One:The internal air gap measurement equipment for dynamic pressure motor

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