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基于光机械多探针原理的广域薄膜表面形貌测量方法研究

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  • Leading Scientist:liushujie

  • Supported by:国家自然科学基金项目

  • Sub-Class of Project:青年科学基金项目

  • Status:结题

  • Supported by:国家自然科学基金委员会

  • Nature of Project:纵向

  • Project Approval Number:51205043

  • Date of Project Approval:2012-09-25

  • Date of Project Initiation:2013-01-01

  • Scheduled completion time:2015-12-31

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Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024 Click:
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