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论文类型：会议论文

发表时间：2016-04-26

收录刊物：EI、CPCI-S、Scopus

卷号：9685

关键字：Polymer-based optical splitter; multimode interference; UV-based soft imprint lithography

摘要：A polymer-based multimode interference (MMI) optical splitter chip has been fabricated through UV-based soft imprint lithography (Soft UV-NIL) technique. Propagation loss and bending loss are considered during the chip design in order to decrease the insertion loss. UV curable fluorinated acrylate resin is used due to its low material absorbing loss. 1x4 cascaded MMI splitter is fabricated and measured at 1550 nm optical wavelength and an average 12.38 dB insertion loss is obtained together with an 1.23 dB uniformity.