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论文类型：期刊论文

发表时间：2016-11-01

发表刊物：OPTICAL ENGINEERING

收录刊物：SCIE

卷号：55

期号：11

ISSN号：0091-3286

关键字：multimode interference; optical splitter; polymer; nanoimprint lithography

摘要：A polymer-based multimode interference optical splitter chip has been designed and fabricated. Fiber-waveguide coupling loss as well as the structure of the multimode waveguide are optimized in the design to achieve higher performance. A simple UV-based soft nanoimprint lithography (Soft UV-NIL) technique is adopted in the fabrication. Fluorinated acrylate resins, LFR, with different refractive indices are used in this work. Both the residual layer and waveguide deformation are improved by controlling the fabrication processes. An average of 12.98 dB insertion loss is obtained from 1 x 4 splitters with 1.08 dB uniformity and 0.05 dB polarization-dependent loss. The validity of the polymer optical splitters fabricated through Soft UV-NIL technique is demonstrated by software simulation as well as experimental works. (C) 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)