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Fabrication of 1D nanochannels on thermoplastic substrates using microchannel compression

Release Time:2019-03-11  Hits:

Indexed by: Journal Article

Date of Publication: 2013-11-01

Journal: 2nd International Conference on Engineering and Technology Innovation (ICETI)

Included Journals: Scopus、CPCI-S、EI、SCIE

Volume: 19

Issue: 11,SI

Page Number: 1845-1850

ISSN: 0946-7076

Abstract: We present a new method to fabricate one-dimensional (1D) nanochannels on a thermoplastic substrate. This method has two main steps. First, a mold with microscale features is used to replicate microchannels on a thermoplastic substrate. Second, the fabricated microchannel is compressed to a 1D nanochannel at a temperature above the glass transition temperature (T-g) of the themoplastics. The effects of compression temperature, compression pressure, retaining time and loading rate on microchannel compression have been studied. Results have shown that a 1D nanochannel of 1-30 mu m wide and 200-300 nm deep can be readily fabricated by using this method.

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