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Date of Publication:2024-11-15
Journal:International Journal of Machine Tools and Manufacture
Volume:203
ISSN No.:0890-6955
Key Words:Cathodes; Composite micromechanics; Electric-field control; Electric field distributions; Electrochemical electrodes; Etching; Machining Accuracy; Machining Process; Metal microstructure; Micromachining; Microstructure; Novel methods; Stringent requirement; Through-mask electrochemical micromachining; Uniformity; Workpiece