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差分高压射频电源

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Leading Scientist:李胜铭

Project Participants:lu hu chuan,hufangyuan,wu zhenyu

Supported by:企事业单位委托科技项目

Status:在研

Supported by:昆山聂尔精密仪器有限公司

Nature of Project:横向

Date of Project Approval:2021-04-07

Scheduled completion time:2022-11-30

Date of Project Initiation:2021-04-07

Date of Project Completion:2022-11-30

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