Effect of melt flow rate and S/L interface on the P horizontal distribution in silicon
Release Time:2022-10-03 Hits:
Date of Publication: 2022-10-02
Journal: VACUUM
Institution: 材料科学与工程学院
Volume: 190
ISSN: 0042-207X
Key Words: "Melt flow; Solid-liquid interface; n-type silicon; Doping control"