Current position: Home >> Scientific Research >> Patents

局部加热凝固多晶硅除杂装置及除杂方法

Hits:

First Author:lipengting

Disigner of the Invention:温书涛,jiangdachuan,林海洋,Yi Tan,shishuang

Application Number:CN201410339759.2

Authorization Date:2014-07-17

Authorization number:CN104131343A

Pre One:电磁扰动多晶硅除杂装置及其方法

Next One:一种底部气冷的多晶硅半熔铸锭装置及工艺