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一种铝硼母合金掺杂制备多晶硅靶材的铸造工艺

Release Time:2019-10-11  Hits:

First Author: 李鹏廷

Disigner of the Invention: 姜大川,王凯,Yi Tan,任世强

Application Number: CN201610594698.3

Authorization Date: 2016-07-26

Authorization Number: CN106149050A

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