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一种底部补偿硼元素的多晶硅铸锭工艺

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First Author:lipengting

Disigner of the Invention:jiangdachuan,lijiayan,renshijiang,Yi Tan,shishuang

Affilication of Author(s):材料科学与工程学院

Application Number:CN103849931A

Authorization number:CN201410123650.5

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