Current position: Home >> Scientific Research >> Patents

一种砷、磷元素共掺制备n型多晶硅靶材的铸造工艺

Hits:

First Author:王凯

Disigner of the Invention:lipengting,Yi Tan

Application Number:CN109082643A

Authorization number:CN201811025321.1

Pre One:一种电子束熔炼过程中提高挥发性杂质除杂量的方法及装置

Next One:局部加热凝固多晶硅除杂装置及除杂方法