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Indexed by:期刊论文

Date of Publication:2016-09-01

Journal:IEEE SENSORS JOURNAL

Included Journals:SCIE、EI、Scopus

Volume:16

Issue:17

Page Number:6579-6585

ISSN No.:1530-437X

Key Words:Nanoimprint lithography (NIL); polarization navigation; integration process

Abstract:We report a method of integrating the single-layer nanowire polarizers with photodetectors, and the fabricated device is used as the polarization navigation sensor. The fabrication processes mainly based on nanoimprint lithography and dry etching. The fabrication method can fabricate nanogratings with multi-orientation simultaneously, so angular alignment error is eliminated. The external quantum efficiency of the integrated device is tested, and a peak external quantum efficiency of 23% at around 440 nm is achieved. The indoor angle output experiment of a navigation sensor is investigated, and the angle output error is tested to be within +/- 0.1 degrees. The outdoor angle output experiment has also been tested, and the errors are less than +/- 1.5 degrees. The measurement results show that the fabricated device is suitable for polarization navigation.