Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding
Release Time:2023-06-13 Hits:
Date of Publication: 2022-10-03
Journal: JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Institution: 机械工程学院
Volume: 31
Issue: 8
ISSN: 0960-1317
Key Words: "nanoimprint lithography; nanochannel; enrichment"