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Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding

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Date of Publication:2022-10-03

Journal:JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Affiliation of Author(s):机械工程学院

Volume:31

Issue:8

ISSN No.:0960-1317

Key Words:"nanoimprint lithography; nanochannel; enrichment"

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