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论文类型：会议论文

发表时间：2018-01-01

收录刊物：CPCI-S

页面范围：66-71

关键字：SU-8; Photoelastic; Micro-force sensor; Micro fabrication

摘要：In order to develop a micro-force sensor with a high sensitivity, simple structure and low cost, a photoelastic SU-8 micro-force sensor is proposed in this paper. To improve the measurement sensitivity, a stress concentration area with flexible hinge shape is designed as the measurement region of the micro-force sensor. The measurement optical path of the SU-8 micro-force sensor is designed based on the photoelastic principle. A simple process with a UV-lithography process and a release process is used to fabricate the designed sensor. According to the experiment results, the sensor resolution is 51.44 nN similar to 3.29 mu N and the repeatability error is similar to 7.47%. With the single-layer simple structure and good biocompatibility, the micro-force sensor has a good application prospect.