location: Current position: Home >> Scientific Research >> Paper Publications

A novel 2D silicon nano-mold fabricationtechnique by inclined-deposition and Ar etching over 4 inch large area

Hits:

Indexed by:期刊论文

Date of Publication:2016-01-01

Journal:Scientific Reports

Volume:6

Issue:1

Page Number:1892101-1892110

Pre One:Low auto-fluorescence fabrication methods for plastic nanoslits

Next One:Wheelchair users' perceived exertion during typical mobility activities