Current position: Home >> Scientific Research >> Paper Publications

A low-cost fabrication method of nanostructures by ultraviolet proximity exposing lithography

Release Time:2023-01-08  Hits:

Date of Publication: 2022-10-04

Journal: AIP Advances

Volume: 10

Issue: 4

Prev One:A double layer resist method to improve descum result when removing negative photoresist

Next One:A low-cost method of fabricating hybrid micro-nano fluidic chip by double-layer PDMS mold and UV-thermal nanoimprinting