Current position: Home >> Scientific Research >> Paper Publications

Low auto-fluorescence fabrication methods for plastic nanoslits

Release Time:2023-01-08  Hits:

Date of Publication: 2022-10-03

Journal: IET Nanobiotechnology

Volume: 10

Issue: 2

Page Number: 75-80

ISSN: 1751-8741

Prev One:Fabrication of 2D silicon nano-mold by side etch lift-off method

Next One:A double layer resist method to improve descum result when removing negative photoresist