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Low auto-fluorescence fabrication methods for plastic nanoslits

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Date of Publication:2022-10-03

Journal:IET Nanobiotechnology

Volume:10

Issue:2

Page Number:75-80

ISSN No.:1751-8741

Pre One:Fabrication of 2D silicon nano-mold by side etch lift-off method

Next One:A double layer resist method to improve descum result when removing negative photoresist
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