location: Current position: Home >> Scientific Research >> Paper Publications

Two-dimensional detection of subsurface damage in silicon wafers with polarized laser scattering

Hits:

Date of Publication:2022-10-03

Journal:JOURNAL OF MATERIALS PROCESSING TECHNOLOGY

Volume:284

ISSN No.:0924-0136

Next One:Experimental study on additive/subtractive hybrid manufacturing of 6511 steel: process optimization and machining characteristics