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Academic Titles:机械工程学院副院长
Degree:Doctoral Degree
School/Department:机械工程学院

Discipline:Mechanical Manufacture and Automation
Mechatronic Engineering
Mechanical Design and Theory

马广义

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Gender:Male

Alma Mater:大连理工大学

Paper Publications

位错对薄硅片激光弯曲过程的影响
Release Time:2022-09-13  Hits:

Date of Publication:2008-01-01
Journal:中国激光
Institution:机械工程学院
Issue:5
Page Number:772-775
ISSN:0258-7025
Abstract:Based on slip line and stacking fault appeared on the silicon surface, the dislocation theory is used to analyze the reasons of causing dislocation and stacking fault during the bending process and study their influence on the laser bending, according to the experiment of thin silicon laser bending. The analyzed results indicate that the slip line is caused by the dislocation accumulation, and the stacking fault is the results of piled dislocation. Meanwhile influence of the dislocation density and dislocation moving velocity on the process of laser bending is analyzed. The changing process of dislocation density and the deceased dislocation moving velocity are considered to form maximal angle.
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