大连理工大学主页平台管理系统赵秀明 Experimental evidence of ferroelectricity in calcium doped hafnium oxide thin films 中文主页

论文成果

Experimental evidence of ferroelectricity in calcium doped hafnium oxide thin films: 点击次数：; 发布时间： 2019-11-04; 发布时间：2019-11-04; 论文类型：期刊论文; 发表时间：2019-10-21; 发表刊物：JOURNAL OF APPLIED PHYSICS; 收录刊物：SCIE、EI; 卷号：126; 期号：15; ISSN号：0021-8979; 摘要：Ferroelectricity in calcium doped hafnium oxide (Ca:HfO2) thin films has been experimentally proved for the first time in this work. All films prepared by chemical solution deposition exhibited smooth and crack-free surfaces, which were observed using an atomic force microscope. After 10(4) field cycling, a maximum remanent polarization of 10.5 mu C/cm(2) was achieved in HfO2 films with 4.8 mol. % Ca content. Meanwhile, the breakdown of the film occurred after 7 x 10(6) electric cycles. A phase transition from the monoclinic phase to cubic/orthorhombic phases was observed with increasing Ca concentration. We suggest the change in oxygen vacancy concentration as the origin of phase evolution, which was confirmed by X-ray photoelectron spectroscopy analysis. These results open a new pathway for realizing ferroelectricity in HfO2-based films. Published under license by AIP Publishing.

工程师

性别：女

毕业院校：大连理工大学

学位：博士

所在单位：化工海洋与生命学院

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