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论文类型：会议论文

发表时间：2014-03-28

收录刊物：EI

卷号：912-914

页面范围：325-328

摘要：VO2 films were grown on sapphire substrates by pulsed laser deposition (PLD), and the structural and optical properties of as-grown films were investigated by X-ray diffraction (XRD), field effect scanning electron microscopy (FESEM), photoluminescence (PL), and optical-transmission measurements. The oxygen partial pressure in the growth chamber was found to be the key factor deciding the microstructure and properties of as-deposited VO2 films, and its effects and corresponding mechanism were investigated systemically. Results indicated that dense and uniform VO2 films with smooth surface were achieved by PLD under optimized oxygen partial pressure. Strong blue emission peaks were observed in room temperature photoluminescence (PL) spectra. Excellent selective optical-transmission of the VO2 thin films from 200~3000 nm were also recorded at room temperature. © (2014) Trans Tech Publications, Switzerland.