Indexed by:期刊论文
Date of Publication:2012-12-21
Journal:实验力学
Included Journals:PKU、ISTIC、CSCD
Volume:28
Issue:2
Page Number:158-165
ISSN No.:1001-4888
Key Words:高频光栅;节距误差;采样云纹法
Abstract:使用采样云纹法来研究高频光栅节距的畸变程度.用电子束刻蚀的3922 line/mm的平行光栅,对其高分辨率扫描电镜图像进行采样和相移分析,得到对应的相位分布,进而转化为相对误差.对于正交光栅,分别进行水平和垂直方向线性滤波后转化为对应的平行光栅,进而得到相对误差分布,并提出误差统计分析来评价光栅质量.理论和实验验证表明采样云纹法可为高频光栅提供评价手段.
Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Gender:Male
Alma Mater:Dalian University of Technology (DUT)
Degree:Doctoral Degree
School/Department:State Key Laboratory of Industrial Equipment for Structral Analysis, Department of Engineering Mechanics
Discipline:Solid Mechanics. Applied and Experimental Mechanics. Engineering Mechanics. Mechanical Manufacture and Automation. Vehicle Engineering. Aerospace Mechanics and Engineering. mechanics of manufacturing process
Business Address:Room 321, Department of Engineering Mechanics
Contact Information:Tel.: 86 0411-84708406 Email: leizk@dlut.edu.cn
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