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黄明亮
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教授   博士生导师   硕士生导师

性别: 男

毕业院校: 大连理工大学

学位: 博士

所在单位: 材料科学与工程学院

学科: 材料学. 功能材料化学与化工. 化学工程

办公地点: 材料楼330办公室

联系方式: 0411-84706595

电子邮箱: huang@dlut.edu.cn

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当前位置: 黄明亮 >> 科学研究 >> 论文成果
Effect of Sn grain orientation on Ni substrate dissolution and intermetallic compounds precipitation in Cu/Sn/Ni interconnect undergoing electromigration

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论文类型: 会议论文

发表时间: 2017-01-01

收录刊物: EI、CPCI-S、Scopus

页面范围: 1291-1295

关键字: electromigration; Sn grain orientation; Ni substrate; dissolution; IMC precipitation

摘要: The solid Sn exists in the beta-type possesses a body-centered tetragonal (BCT) structure. The diffusion coefficient of Ni atoms along the c-axis of Sn grains is about 3x10(4) times faster than the a-axis at 150 degrees C. Ni atoms show different EM characteristics in relation with beta-Sn crystallographic orientation in solder interconnect. The effects of Sn orientation on the dissolution of Ni substrate and intermetallic compounds (IMCs) precipitation during electro migration were investigated in the present work. When the c-axis of Sn grain was parallel to the electron flow direction, extensive Ni dissolution and massive (Ni,Cu)(3)Sn-4 IMC precipitation would occur due to the large diffusion flux of Ni atoms. When the c-axis of Sn grain was roughly perpendicular to the electron flow direction, the diffusion of Ni atoms was strongly retarded, resulting in little dissolution of Ni substrate and the precipitation of (Cu,Ni)(6)Sn-5 IMC in anode.

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