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发表时间：2018-01-01

发表刊物：光学精密工程

卷号：26

期号：2

页面范围：380-387

ISSN号：1004-924X

摘要：The deformation of the three-layered piezoelectric beam in the electric field will arise the in-duced potential,and then change the distribution of the w hole structural electric potential.Consider-ing the coupling effect of the deformation and potential,the accurate analytical expressions,based on the Euler-Bernoulli beam theory,for predicting the performance of three-layered piezoelectric cantile-ver actuators and sensors,were derived.In the derivation process,the governing equation of three-layered piezoelectric beam structure was established with considering the effect of the electric field in-duced by the structural bending deformation,and then two analytical expressions for piezoelectric ac-tuators and sensors were obtained with two different boundary conditions.These two analytical ex-pressions related tip output displacement with driving moment and input voltage for piezoelectric actu-ators,and input voltage with tip force for piezoelectric sensors,respectively.The accuracy of the present expressions was illustrated by comparison of results obtained from ANSYS finite element sim-ulation and conventional expressions for test problems.

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