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论文类型：期刊论文

发表时间：2014-02-01

发表刊物：IEEE SENSORS JOURNAL

收录刊物：SCIE、EI、Scopus

卷号：14

期号：2

页面范围：514-521

ISSN号：1530-437X

关键字：Sensitivity improving method; mass sensor; V-shaped cross section cantilever; measuring accuracy

摘要：Mass detection sensitivity and measuring accuracy of resonant mass sensors are mainly dependent on the analyte position, the resonant frequency, and the effective mass of the cantilever. For measuring concentrated masses or particles, a novel mass sensor incorporating V-shaped cross section cantilever was proposed by locating the analyte at predefined positions for both improving the mass detecting sensitivity and reducing the measuring deviation. The theoretical model for analyzing the mass detection sensitivity was established. With the same geometric dimension, the proposed sensor's sensitivities obtained theoretically and experimentally are 6.75 x 10(4) and 6.34 x 10(4) Hz/g, which are nearly 2.20 times as great as that of the custom made cantilever with a rectangular cross section. Thus, the feasibility of the proposed sensitivity improving method was adequately validated.