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论文类型： 期刊论文

发表时间： 2016-01-01

发表刊物： International Journal of Industrial and Systems Engineering

收录刊物： EI

卷号： 22

期号： 2

页面范围： 145-160

ISSN号： 17485037

摘要： Due to the limitation that etching technique is difficult to machine the copper layer of copper-clad polyimide (CCPI) with three-dimensional structure precisely and integrally, an effective way combining laser and micro-milling is proposed to solve this problem. By detecting the control of these two processing methods, a precise five-axis laser/micro-milling machine tool has been developed. The machine tool is based on SIEMENS 840D sl CNC system. The high-speed precise manual/automatic laser control via the NCU rapid digital output is studied. The method using analogue drive module to control laser power and micro-milling spindle is presented. By combining laser and micro-milling together, the precise machining of copper-clad polyimide with high efficiency and low cost is implemented. Experimental results indicate that this machine tool is suitable for manufacturing copper layer with a minimum width of metal removal of 50 μm and has stable performance and high reliability. Copyright © 2016 Inderscience Enterprises Ltd.