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论文类型：会议论文

发表时间：2010-08-08

收录刊物：EI、CPCI-S、Scopus

卷号：7544

关键字：MEMS micro-cantilever; dynamic characteristics measurement; high temperature environment; base excitation; electrical discharge

摘要：In order to study the dynamic characteristics of silicon micro-cantilever in high temperature environment, the relationship between the first-order resonance frequency of micro-cantilever and the environment temperature was theoretically analyzed. The dynamic measurement equipment was developed for the MEMS microstructure in the high temperature environment. Both the base excitation with PZT and the electrical discharge excitation method were adopted to excite the micro-cantilever under test. The impulse response signal of the microstructure can be obtained using the Laser Doppler Vibrometer. The temperature-frequency characteristics of silicon micro-cantilever has been experimentally studied. Test results show that the resonance frequency of silicon micro-cantilever slightly decreases with the increasing temperature, and it is almost a linear dependence between the change in temperature and the change in resonance frequency, which is consistent with the result of theoretical analysis.