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论文类型：期刊论文

发表时间：2016-10-01

发表刊物：Guangxue Jingmi Gongcheng/Optics and Precision Engineering

收录刊物：EI、PKU、ISTIC、Scopus

卷号：24

页面范围：461-467

ISSN号：1004924X

摘要：Aimed at automatic measurement task of micrometric displacement of piezoelectric ceramic piece for laser gyroscope displacement compensator, automatic measurement equipment is developed. Three-dimensional robot is adopted in the equipment as motion frame, and photoelectric sensor is used as sensor for displacement detection and feedback control, which solves the problem of automatic motion detection, and realizes automatic operation of equipment. The vaccum technology is applied in parts pickup and fixation, which effectively avoids the occurance of accidental damage of slice parts. The high-precision inductance micrometers are used with working mode of relative measurement. As a result, the influence of part transport and placement error on measuring result is eliminated effectively. The equipment can finish the work of automatic part loading, measurement, selection and matching in batches. The experiment results show that the developed equipment improves measuring speed in more than 60 percent compared with existing measuring method, the measurement accuracy is 0.5   m in full measuring range, the repeated accuracy is no more than 0.06   m. Thus, the requirements of the measurement is satisfied based on the high reliability and consistency of the developed equipment. ? 2016, Science Press. All right reserved.