个人信息Personal Information
教授
博士生导师
硕士生导师
性别:男
毕业院校:哈尔滨工业大学
学位:博士
所在单位:机械工程学院
学科:机械电子工程. 精密仪器及机械
电子邮箱:xdwang@dlut.edu.cn
A low temperature ultrasonic bonding method for PMMA microfluidic chips
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论文类型:期刊论文
发表时间:2010-04-01
发表刊物:MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
收录刊物:SCIE、EI、Scopus
卷号:16
期号:4
页面范围:533-541
ISSN号:0946-7076
摘要:Bonding is a bottleneck for mass-production of polymer microfluidic devices. A novel ultrasonic bonding method for rapid and deformation-free bonding of polymethyl methacrylate (PMMA) microfluidic chips is presented in this paper. Convex structures, usually named energy director in ultrasonic welding, were designed and fabricated around micro-channels and reservoirs on the substrates. Under low amplitude ultrasonic vibration, localized heating was generated only on the interface between energy director and cover plate, with peak temperature lower than T (g) (glass transition temperature) of PMMA. With the increasing of temperature, solution of PMMA in isopropanol (IPA) increases and bonding was realized between the contacting surfaces of energy director and cover plate while no solution occurs on the surfaces of other part as their lower temperature. PMMA microfluidic chips with micro-channels of 80 mu m x 80 mu m were successfully bonded with high strength and low dimension loss using this method.