点击次数：

论文类型：期刊论文

发表时间：2008-04-01

发表刊物：INTERNATIONAL JOURNAL OF MATERIALS & PRODUCT TECHNOLOGY

收录刊物：SCIE、EI

卷号：31

期号：2-4

页面范围：386-399

ISSN号：0268-1900

关键字：dynamic characteristic; high g-force; FEM; MEMS

摘要：To study dynamic characteristics of micro-inertial components under high load, a dynamical equation including the effect of dead load (constant acceleration) is discussed. The effects were analysed with finite element method. The results show the natural frequencies of microstructure increase as the inertial force increase. A dynamic testing experimental instrument was developed, and experiment was carried out. The instrument is capable of generating a high g-force environment, imposing impact on microstructure and measuring the response signal. The experimental results show that the natural frequencies of microstructure increase as the environmental acceleration increase, and that is consistent with theoretical analysis.