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论文类型：会议论文

发表时间：2015-07-05

收录刊物：EI、CPCI-S、Scopus

卷号：2015-August

关键字：polymer photonic biosensor; UV-nanoimprint; optical waveguides; microring resonator

摘要：Nowadays there is a permanently growing demand and need for simple, low cost, user friendly and real-time monitoring devices in biosensing technologies. In this context our contribution aims to demonstrate a fast fabrication process of centimeter-scale polymer microring resonators by UV nanoimprint lithography. A negative photoresist (SU-2) patterned by photolithography acts as a master mold in the imprinting process flow. High quality devices were designed and fabricated using rib waveguides with 1 mu m by 1 mu m width and height quadratic geometry. A controllable thickness of the residual layer with values down to 200 nm was achieved by tuning the thickness of the initial layer before imprint and the pattern dimensions of the master mold. The microrings with 1 mu m gap in a racetrack configuration are targeted for operation in a single mode at visible wavelengths, where cheap light sources are available and water absorption is much lower than at infrared wavelengths.